Quantitative atomic resolution elemental mapping via absolute-scale energy dispersive X-ray spectroscopy

Z Chen; M Weyland; X Sang; W Xu; JH Dycus; JM LeBeau; AJ D'Alfonso; LJ Allen; SD Findlay

Journal article

Quantitative atomic resolution elemental mapping via absolute-scale energy dispersive X-ray spectroscopy

Z Chen, M Weyland, X Sang, W Xu, JH Dycus, JM LeBeau, AJ D'Alfonso, LJ Allen, SD Findlay

Ultramicroscopy | ELSEVIER SCIENCE BV | Published : 2016

DOI: 10.1016/j.ultramic.2016.05.008

Abstract

Quantitative agreement on an absolute scale is demonstrated between experiment and simulation for two-dimensional, atomic-resolution elemental mapping via energy dispersive X-ray spectroscopy. This requires all experimental parameters to be carefully characterized. The agreement is good, but some discrepancies remain. The most likely contributing factors are identified and discussed. Previous predictions that increasing the probe forming aperture helps to suppress the channelling enhancement in the average signal are confirmed experimentally. It is emphasized that simple column-by-column analysis requires a choice of sample thickness that compromises between being thick enough to yield a goo..

View full abstract

University of Melbourne Researchers

Les J. Allen Author

Related Projects (2)

Novel advances in sub-nanometer imaging

After two decades of research the first wave of applications in nanotechnology and nanobiology is breaking. Immediately key to further progr..

MAKING EVERY ELECTRON COUNT IN ATOMIC RESOLUTION MICROSCOPY

The development of aberration-corrected electron microscopy, which allows individual atom imaging with unprecedented precision, was recognis..

Grants

Awarded by National Science Foundation

Funding Acknowledgements

We acknowledge the use of facilities for sample preparation and checking in the Monash Centre for Electron Microscopy. This research was supported under the Australian Research Council's Discovery Projects funding scheme (Projects DP110102228 and DP140102538), and its DECRA funding scheme (Project DE130100739). XS, WX, JHD, and JML gratefully acknowledge the Air Force Office of Scientific Research (FA9550-14-1-0182) for support of this research and also acknowledge the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation. JHD acknowledges support for this work by the National Science Foundation Graduate Research Fellowship (Grant DGE-1252376).